✦ LIBER ✦

High-temperature kinetics of some Si- and Cl-containing ceramic precursors

✍ Scribed by A. Kunz; P. Roth

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 332 KB
Volume: 33
Category: Article
ISSN: 0538-8066
DOI: 10.1002/kin.1071

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✦ Synopsis

Abstract

This article summarizes our recent experimental investigations of high‐temperature kinetics of Si‐ and Cl‐containing precursor molecules relevant to chemical vapor synthesis and ceramic processing. Reaction systems using SiCl~4~ and SiHCl~3~ highly diluted in argon, which were studied in a shock tube using the combination of thermal pyrolysis and laser flash photolysis methods, are described. In situ concentrations of the atomic species Si, Cl, and H were measured simultaneously using the atomic resonance absorption spectroscopy. The measured properties were sensitive to a limited number of elementary reactions, which could be analyzed in terms of rate coefficients. © 2001 John Wiley & Sons, Inc. Int J Chem Kinet 33: 741–754, 2001

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