High-temperature kinetics of some Si- an
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A. Kunz; P. Roth
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Article
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2001
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John Wiley and Sons
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English
β 332 KB
## Abstract This article summarizes our recent experimental investigations of highβtemperature kinetics of Siβ and Clβcontaining precursor molecules relevant to chemical vapor synthesis and ceramic processing. Reaction systems using SiCl~4~ and SiHCl~3~ highly diluted in argon, which were studied i