𝔖 Bobbio Scriptorium
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High-speed wear testing of selected ceramics in abrasive slurry

✍ Scribed by Ismailov, Arnold; Levänen, Erkki

Book ID
125482331
Publisher
IOP Publishing
Year
2013
Weight
841 KB
Volume
47
Category
Article
ISSN
1757-8981

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✍ R. Manivannan; S. Ramanathan 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 179 KB

In this study chemical mechanical planarization slurries for shallow trench isolation exhibiting high oxide to nitride polish rate selectivity were investigated and it was found that the abrasives play a major role in suppressing the nitride polish rate and enhancing selectivity. When glutamic acid