Due to the complicated artefacts in SIMS depth profiling, SIMS depth resolution is difficult to evaluate. For evaluation of the SIMS depth resolution, delta-doped layers are more useful than sharp interfaces, because the matrix effect and the sputtering rate change can be minimized in profiling thro
High Spatial Resolution Raman Investigations: of Grown-in Dislocations in Si-doped GaAs
✍ Scribed by Dr. O. Pätzold; Dr. G. Irmer; Prof. Dr. J. Monecke
- Publisher
- John Wiley and Sons
- Year
- 1992
- Tongue
- English
- Weight
- 292 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0232-1300
No coin nor oath required. For personal study only.
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