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High-Resolution Imaging and Spectrometry of Materials

✍ Scribed by Frank Ernst; Manfred Rühle


Book ID
104416383
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
531 KB
Volume
6
Category
Article
ISSN
1369-7021

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## Abstract A charge compensation system, based on a pulsed lowenergy electron flood source, designed for the 1X23S time‐of‐flight secondary ion mass spectrometry (TOFSIMS) instrument is described. Its performance in the non‐imaging mode is illustrated by spectra from polytetrafluoroethene (PTFE).