✦ LIBER ✦

Charge compensation and high-resolution TOFSIMS imaging of insulating materials

✍ Scribed by D. Briggs; M. J. Hearn; I. W. Fletcher; A. R. Waugh; B. J. McIntosh

Book ID: 104592409
Publisher: John Wiley and Sons
Year: 1990
Tongue: English
Weight: 610 KB
Volume: 15
Category: Article
ISSN: 0142-2421
DOI: 10.1002/sia.740150111

No coin nor oath required. For personal study only.

✦ Synopsis

Abstract

A charge compensation system, based on a pulsed lowenergy electron flood source, designed for the 1X23S time‐of‐flight secondary ion mass spectrometry (TOFSIMS) instrument is described. Its performance in the non‐imaging mode is illustrated by spectra from polytetrafluoroethene (PTFE). High‐resolution (∼1 pm) imaging of challenging insulating samples under near‐static SIMS conditions is demonstrated for the first time.

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