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High removal rate of cross-linked SU-8 resist using hydrogen radicals generated by tungsten hot-wire catalyzer

✍ Scribed by Kono, Akihiko; Arai, Yu; Maruoka, Takeshi; Yamamoto, Masashi; Goto, Yousuke; Takahashi, Seiji; Nishiyama, Takashi; Horibe, Hideo

Book ID: 122118742
Publisher: Elsevier Science
Year: 2014
Tongue: English
Weight: 575 KB
Volume: 562
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2014.04.062

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