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High rate sputtering of CoCr with large scale magnetrons - dependence of magnetic properties on sputtering parameters

โœ Scribed by Ludwig, R.; Kastner, K.; Kukla, R.; Mayr, M.


Book ID
114648670
Publisher
IEEE
Year
1987
Tongue
English
Weight
291 KB
Volume
23
Category
Article
ISSN
0018-9464

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