Magnetic field dependence of AlN film properties in dc planar magnetron sputtering with opposed targets

✍ Scribed by K. Tominaga; T. Ao; Y. Sato; I. Mori; K. Kusaka; T. Hanabusa

• Book ID: 108390462
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 484 KB
• Volume: 51
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(98)00247-4