## Abstract Aluminium nitride (AlN) bulk single crystals were grown on offβoriented 4HβSiC substrates by the sublimation method. Highβquality crystals with about 25βmm in diameter and up to 5βmm in thickness were obtained with an optimized growth process. The crystals show hexagonal symmetry with w
β¦ LIBER β¦
High-Quality SiC Bulk Single Crystal Growth Based on Simulation and Experiment
β Scribed by Nishizawa, Shinichi; Kato, Tomohisa; Kitou, Yasuo; Oyanagi, Naoki; Hirose, Fusao; Yamaguchi, Hirotaka; Bahng, Wook; Arai, Kazuo
- Book ID
- 121010910
- Publisher
- Trans Tech Publications, Ltd.
- Year
- 2004
- Tongue
- English
- Weight
- 914 KB
- Volume
- 457-460
- Category
- Article
- ISSN
- 1662-9752
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