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High quality optoelectronic grade epitaxial AlN films on α-Al2O3, Si and 6H-SiC by pulsed laser deposition

✍ Scribed by R.D. Vispute; J. Narayan; J.D. Budai

Book ID: 118549993
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 654 KB
Volume: 299
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(96)09395-9

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