✦ LIBER ✦

High quality low temperature DPECVD silicon dioxide

✍ Scribed by I. Pereyra; M.I. Alayo

Book ID: 117148143
Publisher: Elsevier Science
Year: 1997
Tongue: English
Weight: 462 KB
Volume: 212
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(96)00650-3

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