High quality interpoly dielectrics deposited on the nitrided-polysilicon for nonvolatile memory devices

✍ Scribed by Wen Luh Yang; Tien Sheng Chao; Chun-Ming Cheng; Tung Ming Pan; Tan Fu Lei

• Book ID: 114538720
• Publisher: IEEE
• Year: 2001
• Tongue: English
• Weight: 140 KB
• Volume: 48
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.930643