High Quality Hydrogenated Amorphous Silicon Carbon Layers as Obtained by a Particular Photochemical Vapor Deposition Method

✍ Scribed by Manfredotti, C. ;Fizzotti, F. ;Osenga, C. ;Amato, G. ;Boarino, L.

• Book ID: 105383488
• Publisher: John Wiley and Sons
• Year: 1993
• Tongue: English
• Weight: 474 KB
• Volume: 135
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211350115