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High-quality cutting of polished single-crystal silicon by wire electrical discharge machining

✍ Scribed by Hideo Takino; Toshimitsu Ichinohe; Katsunori Tanimoto; Syuichi Yamaguchi; Kazushi Nomura; Masanori Kunieda

Book ID: 108252157
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 580 KB
Volume: 29
Category: Article
ISSN: 0141-6359
DOI: 10.1016/j.precisioneng.2004.12.004

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