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High efficiency fine boring of monocrystalline silicon ingot by electrical discharge machining

✍ Scribed by Yoshiyuki; Akira Okada; Yasuhiro Okamoto; Kazuo Yamazaki; Subhash H Risbud; Yoshiaki Yamada

Book ID: 108400683
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 949 KB
Volume: 23
Category: Article
ISSN: 0141-6359
DOI: 10.1016/s0141-6359(98)00029-4

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