𝔖 Bobbio Scriptorium
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High purity niobium for superconducting applications

✍ Scribed by P. Kumar


Book ID
116016977
Publisher
Elsevier Science
Year
1988
Weight
549 KB
Volume
139
Category
Article
ISSN
0022-5088

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A 10 layer circuit process is described that is based on relatively reproducible, high quality, all-niobium (Nb) and niobium nitride (NbN) Josephson junctions. The junctions are fabricated from in-situ trilayer films of S/M-MOx/S using a selective niobium etching process (SNEP), where S is supercond