High purity AlGaAs from methyl-based precursors using in situ gettering of alkoxides

✍ Scribed by J.S. Roberts; J.P.R. David; T.E. Sale; P.L. Tihanyi

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 490 KB
• Volume: 143
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)90048-5