High-purity AlGaAs from methyl-based precursors using in-situ gettering of alkoxides

✍ Scribed by J.S. Roberts; J.P.R. David

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 111 KB
• Volume: 145
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)91173-8