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High-Pressure Synthesis of Crystalline Carbon Nitride Imide, C2N2(NH)

✍ Scribed by Elisabeta Horvath-Bordon; Ralf Riedel; Paul F. McMillan; Peter Kroll; Gerhard Miehe; Peter A. van Aken; Andreas Zerr; Peter Hoppe; Olga Shebanova; Ian McLaren; Stefan Lauterbach; Edwin Kroke; Reinhard Boehler


Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
235 KB
Volume
119
Category
Article
ISSN
0044-8249

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Crystalline carbon nitride deposition by
✍ Lim, S. F.; Wee, A. T. S.; Lin, J.; Chua, D. H. C. 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 432 KB

Carbon nitride films have been deposited on Si(100) substrates by r.f. plasma-enhanced chemical vapour deposition (r.f.-PECVD) using an ethylene-ammonia-hydrogen (C 2 H 4 -NH 3 -H 2 ) source gas mixture followed by rapid thermal annealing (RTA) at 1000 °C for 2 min. The films were characterized in t