✦ LIBER ✦

High precision x-ray metrology

✍ Scribed by P. Seyfried; P. Becker; D. Windisch

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Sub-nm accuracy metrology for ultra-prec

✍ F. Siewert; J. Buchheim; T. Zeschke; G. Brenner; S. Kapitzki; K. Tiedtke 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 918 KB

Precision metrology

📂 Article 📅 1977 🏛 Elsevier Science ⚖ 250 KB

Precision quantameter for high energy X-

✍ Robert R. Wilson 📂 Article 📅 1957 🏛 Elsevier Science ⚖ 428 KB

Pattern placement metrology on x-ray mas

✍ S.C. Nash; C. Bläsing-Bangert; K.-D. Röth 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 241 KB

X-ray metrology for advanced silicon pro

✍ C. Wyon; J.P. Gonchond; D. Delille; A. Michallet; J.C. Royer; L. Kwakman; S. Mar 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 1011 KB

A precision fast dosimeter for pulsed hi

✍ G.C. Bonazzola; S. Costa; A. Crosetto; L.M. Ferrero; R. Garfagnini 📂 Article 📅 1980 🏛 Elsevier Science ⚖ 378 KB