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High power pulsed magnetron sputtering: Fundamentals and applications

✍ Scribed by J. Alami; S. Bolz; K. Sarakinos

Book ID: 116604142
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 341 KB
Volume: 483
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2008.08.104

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