High-performance polycrystalline silicon thin-film transistors with oxide–nitride–oxide gate dielectric and multiple nanowire channels

✍ Scribed by Shih-Ching Chen; Ting-Chang Chang; Po-Tsun Liu; Y.C. Wu; C.C. Tsai; T.S. Chang; Chen-Hsin Lien

• Book ID: 108289440
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 703 KB
• Volume: 515
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2006.07.093