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High-performance PIN photodiodes on TMAH thinned silicon wafers

✍ Scribed by G.-F. Dalla Betta; S. Ronchin; A. Zoboli; N. Zorzi

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 434 KB
Volume: 39
Category: Article
ISSN: 0026-2692
DOI: 10.1016/j.mejo.2008.04.009

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