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High-performance low-maintenance sputter source

✍ Scribed by T.A. Trainor; G.C. Harper; D.J. Hodgkins

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 589 KB
Volume: 287
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(90)91792-a

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