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High mobility SiGe heterostructures fabricated by low-energy plasma-enhanced chemical vapor deposition

✍ Scribed by H. von Känel; D. Chrastina; B. Rössner; G. Isella; J.P. Hague; M. Bollani


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
293 KB
Volume
76
Category
Article
ISSN
0167-9317

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