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High fluence boron implantation into polyimide

✍ Scribed by J. Vacı́k; V. Hnatowicz; J. Červená; V. Peřina; V. Popok; V. Odzhaev; D. Fink

Book ID: 114170757
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 127 KB
Volume: 148
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00814-3

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