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High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths

✍ Scribed by Voronov, Dmitriy L.; Ahn, Minseung; Anderson, Erik H.; Cambie, Rossana; Chang, Chih-Hao; Gullikson, Eric M.; Heilmann, Ralf K.; Salmassi, Farhad; Schattenburg, Mark L.; Warwick, Tony

Book ID: 115433548
Publisher: Optical Society of America
Year: 2010
Tongue: English
Weight: 451 KB
Volume: 35
Category: Article
ISSN: 0146-9592
DOI: 10.1364/OL.35.002615

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