High density plasma assisted sputtering system for various coating processes

✍ Scribed by Seunghun Lee; Jong-Kuk Kim; Jae-Wook Kang; Do-Geun Kim

• Book ID: 116893298
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 804 KB
• Volume: 206
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2012.01.028