High current Ni-ion implantation to synthesize NiSi2 layers on Si with very low resistivity

✍ Scribed by K.Y Gao; B.X Liu

• Book ID: 114170698
• Publisher: Elsevier Science
• Year: 1999
• Tongue: English
• Weight: 114 KB
• Volume: 148
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(98)00750-2