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High-conductivity a-Si:H:F film and its performance for a power sensor and a strain gauge

✍ Scribed by S. Kodato; S. Nishida; M. Konagai; K. Takahashi

Book ID: 118332166
Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 167 KB
Volume: 59-60
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(83)90385-x

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