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Heterolytic dissociation under hot-electron bombardment of the silanic bond at the Si-SiO2 interface

✍ Scribed by G.F. Cerofolini; N. Re


Book ID
106024128
Publisher
Springer
Year
2002
Tongue
English
Weight
135 KB
Volume
74
Category
Article
ISSN
1432-0630

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On the segregation of Ca at SiO2/Si inte
✍ Deenapanray, Prakash N. K.; Petravic, Mladen πŸ“‚ Article πŸ“… 2000 πŸ› John Wiley and Sons 🌐 English βš– 128 KB

Segregation of Ca in Si has been studied using SIMS and RBS. Pronounced Ca profile broadening is observed during SIMS measurements with oxygen ions under bombardment conditions, yielding the formation of a stoichiometric oxide layer at the surface. Additional profiling through the SiO 2 /Si interfac