Helium Ion Microscopy

✍ Scribed by Gregor Hlawacek, Armin Gölzhäuser (eds.)

• Publisher: Springer International Publishing
• Year: 2016
• Tongue: English
• Leaves: 536
• Series: NanoScience and Technology
• Edition: 1
• Category: Library

✦ Synopsis

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.

✦ Table of Contents

Front Matter....Pages i-xxiii
Front Matter....Pages 1-1
The Helium Ion Microscope....Pages 3-30
Single Atom Gas Field Ion Sources for Scanning Ion Microscopy....Pages 31-61
Structural Changes in 2D Materials Due to Scattering of Light Ions....Pages 63-88
Monte Carlo Simulations of Focused Ion Beam Induced Processing....Pages 89-118
Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging....Pages 119-146
Front Matter....Pages 147-147
Introduction to Imaging Techniques in the HIM....Pages 149-172
HIM of Biological Samples....Pages 173-185
HIM Applications in Combustion Science: Imaging of Catalyst Surfaces and Nascent Soot....Pages 187-203
Channeling and Backscatter Imaging....Pages 205-224
Helium Ion Microscopy of Carbon Nanomembranes....Pages 225-244
Helium Ion Microscopy for Two-Dimensional Materials....Pages 245-262
Front Matter....Pages 263-263
Backscattering Spectrometry in the Helium Ion Microscope: Imaging Elemental Compositions on the nm Scale....Pages 265-295
SIMS on the Helium Ion Microscope: A Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics....Pages 297-323
Ionoluminescence....Pages 325-351
Front Matter....Pages 353-353
Direct–Write Milling and Deposition with Noble Gases....Pages 355-393
Resist Assisted Patterning....Pages 395-414
Focused Helium and Neon Ion Beam Modification of High-T C Superconductors and Magnetic Materials....Pages 415-445
Helium Ion Microscope Fabrication of Solid-State Nanopore Devices for Biomolecule Analysis....Pages 447-470
Applications of GFIS in Semiconductors....Pages 471-498
Back Matter....Pages 499-526

✦ Subjects

Spectroscopy and Microscopy;Surfaces and Interfaces, Thin Films;Surface and Interface Science, Thin Films;Nanotechnology and Microengineering