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Heat Resistance of Ga-Doped ZnO Thin Films for Application as Transparent Electrodes in Liquid Crystal Displays

✍ Scribed by Yamamoto, Naoki; Makino, Hisao; Yamada, Takahiro; Hirashima, Yoshinori; Iwaoka, Hiroaki; Ito, Takahiro; Ujihara, Akira; Hokari, Hitoshi; Morita, Hidehiro; Yamamoto, Tetsuya

Book ID: 127010567
Publisher: The Electrochemical Society
Year: 2010
Tongue: English
Weight: 674 KB
Volume: 157
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.3267506

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## Abstract This paper describes the optimization of ZnO:Al (AZO) thin films formed by a magnetron sputtering method for the purpose of creating a substitute for the indium‐tin‐oxide (ITO) transparent electrodes used in liquid crystal display (LCD) applications. New AZO thin‐film preparation techni