He ion beam density effect on damage induced in SiC during Rutherford backscattering measurement

✍ Scribed by N.Q Khánh; Z Zolnai; T Lohner; L Tóth; L Dobos; J Gyulai

• Book ID: 114171807
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 124 KB
• Volume: 161-163
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(99)00778-8