𝔖 Bobbio Scriptorium
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Hawk corp moves into MIM technology


Book ID
117182449
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
158 KB
Volume
56
Category
Article
ISSN
0026-0657

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KLA-Tencor Corp has moves into metal met
πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 491 KB

KLA-Tencor Corp has moved into Rudolph Technologies' domain with an inline metal film metrology tool. Still in beta testing, the Metrix 100 uses an electron beam, x-ray detectors and software algorithms to measure both film thickness and film composition.