Hardness and surface roughness of hydrogenated amorphous carbon films synthesized by atmospheric pressure plasma enhanced CVD method with various pulse frequencies

✍ Scribed by Sakurai, T.; Noborisaka, M.; Hirako, T.; Shirakura, A.; Suzuki, T.

• Book ID: 123050089
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 751 KB
• Volume: 215
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2012.09.058