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Hardness and residual stress in nanocrystalline ZrN films: Effect of bias voltage and heat treatment

✍ Scribed by Hsiao-Ming Tung; Jia-Hong Huang; Ding-Guey Tsai; Chi-Fong Ai; Ge-Ping Yu

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 264 KB
Volume: 500
Category: Article
ISSN: 0921-5093
DOI: 10.1016/j.msea.2008.09.006

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