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Hard carbon films deposited under high ion flux

✍ Scribed by L. Martinu; A. Raveh; A. Domingue; L. Bertrand; J.E. Klemberg-Sapieha; S.C. Gujrathi; M.R. Wertheimer


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
534 KB
Volume
208
Category
Article
ISSN
0040-6090

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