Hard transition metal nitride films deposited by triode ion plating

✍ Scribed by A.S. Korhonen; J.M. Molarius; I. Penttinen; E. Harju

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 819 KB
• Volume: 105-106
• Category: Article
• ISSN: 0921-5093
• DOI: 10.1016/0025-5416(88)90734-3