Handbook of Sputtering Technology

Publisher: William Andrew
Year: 2012
Tongue: English
Leaves: 639
Category: Library

No coin nor oath required. For personal study only.

✦ Table of Contents

Content:
Front-matter, Pages i-iii
Copyright, Page iv
Preface, Pages xi-xii, Kiyotaka Wasa
1 - Thin Films and Nanomaterials, Pages 3-39, Hideaki Adachi, Kiyotaka Wasa
2 - Sputtering Phenomena, Pages 41-75, Kiyotaka Wasa
3 - Sputtering Systems, Pages 77-139, Kiyotaka Wasa
4 - Computer Simulation, Pages 143-294, Tomoyoshi Motohiro
5 - Basic Process of Sputtering Deposition, Pages 295-359, Hideaki Adachi, Tomonobu Hata, Kiyotaka Wasa
6 - Functional Thin Films, Pages 361-520, Kikuo Tominaga, Hideaki Adachi, Kiyotaka Wasa
7 - Ferroelectric Thin Films, Pages 523-558, Kiyotaka Wasa, Tomoaki Matsushima
8 - Thin Film MEMS, Pages 559-596, Tomoaki Matsushima, Isaku Kanno, Kiyotaka Wasa
9 - Micro-Fabrication by Sputtering, Pages 597-622, Kiyotaka Wasa, Tomoaki Matsushima
Appendix 1 - Fundamental Physical Constants, Pages 623-624
Appendix 2 - Table of Conversion Factors, Page 625
Appendix 3 - Electric Units, Their Symbols and Conversion Factors, Pages 627-628
Postscript, Pages 629-630, Kiyotaka Wasa
Index, Pages 631-644

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