Thin Film Materials Technology: Sputtering of Compound Materials

✍ Scribed by Kiyotaka Wasa, Makoto Haber, Hideaki Adachi

• Publisher: William Andrew
• Year: 2005
• Tongue: English
• Leaves: 533
• Category: Library

✦ Synopsis

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

✦ Table of Contents

THIN FILM MATERIALS TECHNOLOGY......Page 4
Related Electronic Materials and Process Technology......Page 6
Preface......Page 8
Table of Contents......Page 12
1 Thin Film Materials and Devices......Page 16
2 Thin Film Processes......Page 32
3 Sputtering Phenomena......Page 86
4 Sputtering Systems......Page 130
5 Deposition of Compound Thin Films......Page 206
6 Structural Control of Compound Thin Films: Perovskite and Nanometer Oxide Thin Films......Page 420
7 Microfabrication by Sputtering......Page 480
Appendix......Page 508
List of Acronyms......Page 512
Index......Page 516

✦ Subjects

Металлургия и обработка металлов;Нанесение покрытий;