๐”– Bobbio Scriptorium
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Handbook of Physical Vapor Deposition (PVD) Processing || The Sub-Atmospheric Processing Environment

โœ Scribed by Mattox, Donald M.


Book ID
121298491
Publisher
Elsevier
Year
2010
Weight
365 KB
Category
Article
ISBN
0815520379

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Handbook of Physical Vapor Deposition (P
โœ Mattox, Donald M. ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier ๐ŸŒ English โš– 94 KB

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that