Hafnium silicate formation by ultra-violet/ozone oxidation of hafnium silicide

✍ Scribed by P Punchaipetch; G Pant; M Quevedo-Lopez; H Zhang; M El-Bouanani; M.J Kim; R.M Wallace; B.E Gnade

• Book ID: 108388586
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 433 KB
• Volume: 425
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(02)01306-8