Growth rates and mechanism of electrochemical vapor deposited yttria-stabilized zirconia films
β Scribed by Michael F. Carolan; James N. Michaels
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 456 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0167-2738
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Thin films of yttria-stabilized zirconia (YSZ) were formed onto nickel oxide substrates by an electrochemical vapor deposition process using the substrates as oxygen sources, and ZrCl, and YCl, as metal sources. After deposition at 1000Β°C for l-6 h, dense films of cubic YSZ were formed. The film thi
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