Selectivity enhancement by hydrogen addi
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Shioda, Tomonari ;Sugiyama, Masakazu ;Shimogaki, Yukihiro ;Nakano, Yoshiaki
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Article
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2010
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John Wiley and Sons
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English
⚖ 407 KB
## Abstract Selective area metal‐organic vapor phase epitaxy (SA‐MOVPE) allows in‐plane control of layer composition and thickness. The use of relatively wide (>10 µm) selective masks brings about large wavelength modulation, taking advantage of vapor‐phase diffusion of precursors. The wide masks,