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Growth rate and composition of InGaN during InGaN/GaN quantum wells selective area metal-organic vapor phase epitaxy considering surface diffusion

✍ Scribed by So, Byung Moon ;Youn, Suk Bum ;Im, Ik-Tae


Book ID
120077152
Publisher
Elsevier
Year
2013
Tongue
English
Weight
738 KB
Volume
19
Category
Article
ISSN
1226-086X

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## Abstract Selective area metal‐organic vapor phase epitaxy (SA‐MOVPE) allows in‐plane control of layer composition and thickness. The use of relatively wide (>10 µm) selective masks brings about large wavelength modulation, taking advantage of vapor‐phase diffusion of precursors. The wide masks,