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Growth of ZnS films by chemical vapor deposition of Zn[S2CN(CH3)2]2 precursor

✍ Scribed by Everett Y.M. Lee; Nguyen H. Tran; Robert N. Lamb

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 184 KB
Volume: 241
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2004.07.003

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