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Growth of well-aligned carbon nanotube arrays on silicon substrates using porous alumina film as a nanotemplate

✍ Scribed by Hu, Wenchong; Gong, Dawei; Chen, Zhi; Yuan, Liming; Saito, Kozo; Grimes, Craig A.; Kichambare, Padmakar

Book ID
119998809
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
700 KB
Volume
79
Category
Article
ISSN
0003-6951

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## Abstract Carbon nanotube (CNT) arrays with different packing density were synthesized by inductively coupled plasma (ICP‐)CVD using anodic alumina oxide (AAO) on Si as a nanotemplate. Pre‐electrodeposited Ni nanowires and CH~4~ were used as catalyst and reaction gas, respectively. The parameters