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Growth of titanium silicate thin films by photo-induced chemical vapor deposition

✍ Scribed by Z.M. Wang; Q. Fang; J.-Y. Zhang; J.X. Wu; Y. Di; W. Chen; M.L. Chen; Ian W. Boyd


Book ID
113936593
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
111 KB
Volume
453-454
Category
Article
ISSN
0040-6090

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