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Growth of SrTiO[sub 3] and BaTiO[sub 3] Thin Films by Atomic Layer Deposition

✍ Scribed by Vehkamäki, Marko

Book ID: 121695331
Publisher: The Electrochemical Society
Year: 1999
Tongue: English
Weight: 156 KB
Volume: 2
Category: Article
ISSN: 1099-0062
DOI: 10.1149/1.1390884

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